An accurate, scalable RF subcircuit model is presented for Metal-Oxide-Metal (MOM) capacitor. Polynomial equations are used to describe the relation between the value of each subcircuit component and the area of MOM capacitor. The model fits very well the measured data in frequency range 50 MHz to 10 GHz. The scalable characteristic of model makes it very easy to be implemented in normal EDA software and provides great convenience for circuit designer.
