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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Semiconductor Device Modeling |
| | The 2.4F2 Memory Cell Technology with Stacked-Surrounding Gate Transistor (S-SGT) DRAM | | Authors: | M. Suzuki, T. Endoh, H. Sakuraba and F. Masuoka | | Affilation: | Tohoku University, Japan | | Pages: | 388 - 391 | | Keywords: | SGT, S-SGT, DRAM, three-dimensional memory | | Abstract: | This paper reports that the Stacked-Surrounding Gate Transistor (S-SGT) DRAM achieves a cell size of 2.4F 2. The S-SGT DRAM is structured by stacking several SGT-type cells in series vertically. In order to realize cell size of 2.4F 2, we propose the cell design of S-SGT DRAM. By using proposed design, we demonstrate that the S-SGT DRAM can realize cell size of 2.4F 2 by process simulation, while cell size of conventional SGT DRAM is 4.8F 2. Therefore, the S-SGT DRAM is a promising candidate for future ultra high density DRAMs. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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