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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Equivalent Circuits, Behavioral and Multi-Level Simulation |
| | Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM | | Authors: | H.J. Lee, S.B. Crary, B Affour, D. Bernstein, Y.B. Gianchandani, D.M. Woodcock and M.A. Maher | | Affilation: | MEMSCAP S.A., France | | Pages: | 201 - 204 | | Keywords: | design of experiments, computer simulation, I-optimality, microaccelerometer, metamodel | | Abstract: | We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE using T-SPICE. A five-factor microaccelerometer example demonstrates that highly accurate dynamical simulations are possible, in some cases, using a very small number of static FEA simulations. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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