 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System-Level Modeling and Simulation of MEMS |
| - | System Level Simulation of an Electrostatically Levitated Disk |
| | M. Kraft and A. Evans |
| | University of Southampton, United Kingdom |
| - | Compact MEMS Modeling for Design Studies |
| | P. Voigt and G. Wachutka |
| | University of Technology, Germany |
| - | Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures |
| | M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka |
| | Munich University of Technology, Germany |
| - | Towards Microelectrofluidic System (MEFS) Computing and Architecture |
| | A. Dewey, R.B. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack |
| | Duke University, U.S.A. |
| - | Macro-Modeling of Systems Including Free-Space Optical MEMS |
| | T.P. Kurzweg and A.S. Morris |
| | Uiversity of Pittsburgh, U.S.A. |
| - | Layout Synthesis of CMOS MEMS Accelerometers |
| | V. Gupta and T. Mukherjee |
| | Carnegie Mellon University, U.S.A. |
| - | Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators |
| | E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran |
| | National University of Singapore, Singapore |
| - | Investigation of the Dynamics of Microdevices - As a Design Tool |
| | D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky |
| | RAFAEL Microsystems Group, Israel |
| - | Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects |
| | T. Veijola |
| | Helsinki University of Technology, Finland |
| - | Modeling and Optimization of Bi-stable Optical Switch |
| | H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita |
| | Cybernet Systems Co. Ltd., Japan |
| - | HDL-A-Model of a Micromachined Tuning Fork Gyroscope |
| | J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiß and B. Wenk |
| | FhG-ISIT, Germany |
| - | Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications |
| | A. Mohamed, H. Elsimary and M. Ismail |
| | Ohio State University, U.S.A. |
| - | Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators |
| | Y. Chen, Y. Shroff and W.G. Oldham |
| | University of California, U.S.A. |
| - | Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives |
| | H. Xie, L. Erdman, Q. Jing and G.K. Fedder |
| | Carnegie Mellon University, U.S.A. |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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