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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems |
| | Numerical Simulation of Micro Assembly Techniques in MEMS Devices | | Authors: | N. Finch, D. Keating and Y. He | | Affilation: | IntelliSense Corporation, U.S.A. | | Pages: | 720 - 722 | | Keywords: | numerical simulation, micro-assembly techniques, MEMS devices | | Abstract: | This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS devices that can deform out of plane. Applications include latching mechanisms and tilting mirrors. The simulation methodology has been developed which allows a MEMS designer to take into account the required actuation forces, interfacing mechanisms, and time constraints for micro-assembly. The simulation results rely on multi-stage contact analysis, dynamic analysis, and large displacement theory. Results will be presented for two case examples. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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