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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems |
| | GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS | | Authors: | N. Wilson, K. Wang, D. Yergeau and R.W. Dutton | | Affilation: | Stanford University, U.S.A. | | Pages: | 716 - 719 | | Keywords: | geometry, MEMS, solid modeling, levelset, TCAD | | Abstract: | This paper will detail the capabilities of a new geometric modeling tool, called Geodesic, which is being released in source code form to the general community. In addition to providing geometric operations to create geometry useful in MEMS simulation, it uniquely offers a fully integrated 3-D levelset kernel that permits highly accurate physically based deposition and etching simulation. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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