Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Chapter 17:

Software Tools, CAD Systems

-Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)
 D.F. Ostergaard and M. Gyimesi
 ANSYS, Inc., US
-Modeling and Simulation of 3D Structures for Gigabit DRAM
 O. Kwon, S. Yoon, Y. Ban and T. Won
 Inha University, KR
-A New Analytical Micromotor Design Models for CAD PC-Design Tools
 A. Salman, A. Napieralski and G. Jablolski
 Technical University of Lodz, PL
-3D MEMS Design via Matlab Interactive Plots
 N.R. Lo and K.S.J. Pister
 University of California, US
-Wafer Fabrication Process Simulation Including Cost: Which Should be Used in an In-Line Wafer Inspection Strategy, High Sensitivity and High Cost Inspection Machine or Low Sensitivity and Low Cost Inspection Machine?
 K. Nakamae, S. Yamaji and H. Fujioka
 Osaka University, JP
-High-Fidelity and Reduced Models of Synthetic Microjets
 A.J. Przekwas, M. Turowski and Z. Chen
 CFD Research Corporation, US
-Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods
 S. Reh, P. Lethbridge and D.F. Ostergaard
 ANSYS, Inc., US
-CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations
 Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas
 CFD Research Corporation, US
-GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS
 N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
 Stanford University, US
-Numerical Simulation of Micro Assembly Techniques in MEMS Devices
 N. Finch, D. Keating and Y. He
 IntelliSense Corporation, US
-Modified Nodal Analysis for MEMS with Multi-Energy Domains
 J.V. Clark, N. Zhou and K.S.J. Pister
 University of California at Berkeley, US
-A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems
 M.Z. Pindera, S. Bayyuk, V. Upadhya and A.J. Przekwas
 CFD Research Corporation, US
-Analysis of Realistic Large MEMS Devices
 P. Ljung, M. B├Ąchtold and M. Spasojevic
 Coyote Systems, Inc., US
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