Kurzweg T.P., Levitan S.P., Martinez J.A., Marchand P.J., Shomsky M.T., Chiarulli D.M.
University of Pittsburgh, US
Keywords: MEMS-CAD, micro-optics, MOEMS, optical MEMS
In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and the goal of having an interactive CAD tool. After examining several classical methods, we conclude with the choice of an optical propagation method and the implementation of this method in our free-space opto-electro-mechanical CAD tool, Chatoyant.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 656 - 659
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0