Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Chapter 14:

Applications: MEMS, Sensors

-Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact
 E.K. Chan and R.W. Dutton
 Stanford University, US
-Modeling and Control of Nanomirrors for EUV Maskless Lithography
 Y. Chen, Y. Shroff and W.G. Oldham
 University of California, US
-Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors
 K. Matsuda and Y. Kanda
 Naruto University of Education, JP
-The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices
 N. Mankame and G.K. Ananthasuresh
 University of Pennsylvania, US
-Analysis of Anodic Bonding and Packaging Effects in Micro Sensors
 T-K. Shing
 Industrial Technology Research Institute, TW
-Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications
 A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh
 Purdue University, US
-Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment
 Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen
 National University of Singapore, SG
-On Design of a Backplate Used in a Hearing Aid
 N.L. Pedersen
 Technical University of Denmark, DK
-Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer
 G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu
 Peking University, CN
ISBN:0-9666135-7-0
Pages:741
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