 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 14: Applications: MEMS, Sensors |
| - | Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact |
| | E.K. Chan and R.W. Dutton |
| | Stanford University, U.S.A. |
| - | Modeling and Control of Nanomirrors for EUV Maskless Lithography |
| | Y. Chen, Y. Shroff and W.G. Oldham |
| | University of California, U.S.A. |
| - | Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors |
| | K. Matsuda and Y. Kanda |
| | Naruto University of Education, Japan |
| - | The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices |
| | N. Mankame and G.K. Ananthasuresh |
| | University of Pennsylvania, U.S.A. |
| - | Analysis of Anodic Bonding and Packaging Effects in Micro Sensors |
| | T-K. Shing |
| | Industrial Technology Research Institute, Taiwan |
| - | Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications |
| | A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh |
| | Purdue University, U.S.A. |
| - | Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment |
| | Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen |
| | National University of Singapore, Singapore |
| - | On Design of a Backplate Used in a Hearing Aid |
| | N.L. Pedersen |
| | Technical University of Denmark, Denmark |
| - | Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer |
| | G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu |
| | Peking University, China |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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