Bernstein D., Guidotti P., Pelesko J.A.
California Institute of Technology, US
Keywords: actuator, asymptotics, continuation, MEMS, modeling
We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space of the displacement, implying the existence f a critical voltage beyond which there are no solutions of the equations. This critical voltage corresponds to the pull-in voltage observed in simpler lumped models, the numerical solution of three dimensional models, and also in experimental devices. We show how pseudo-arclength continuation may be used to efficiently compuet the solutions on both sides of the fold.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 489 - 492
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0