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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Numerics, Algorithms |
| | Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry | | Authors: | S. Taschini, H. Baltes and J.G. Korvink | | Affilation: | ETH-Hoenggerberg, Switzerland | | Pages: | 485 - 488 | | Keywords: | nonlinear analysis, electrostatic actuationa, MEMS | | Abstract: | We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based algorithms to solve these non-linear problems, as well as in the analysis of their stability. Our for-mulation of the Jacobian matrix relies on the discretization of the electrostatic sub-model by means of the collocation boundary-element method. It is independent of the discreti-zation method (either boundary or finite elements) and of possible non-linearities in the mechanical sub-model. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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