MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 11

A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Authors: D.T.K. Kwok, Z.M. Zeng and P.K. Chu

Affilation: City University of Hong Kong, China

Pages: 505 - 508

Keywords: Poisson's equation, center axis, numerical iteration, cylindrical co-ordinate, non-symmetry field

A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f along the center axis. The new approach is tested by comparing the potential distribution of a biased cylindrical duct simulated by two dimensional l'Hospital rule. The capability of the method to model non-symmetry field structure is verified by simulating the potential distribution inside the cylindrical duct with only a three quarter of the wall biased with a positive voltage.

ISBN: 0-9666135-7-0
Pages: 741

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