Hansen U., Germer C., Büttgenbach S., Franke H-J
TU Braunschweig, DE
Keywords: MST CAD, process compatibility, process configuration, process rules
In conventional mechanical engineering the development of a product is influenced only little by the specific requirements of the fabrication processes. When looking at the domain of micro mechanical devices this circumstance is no longer given. The design choices made while constructing a micro system are highly dependent on the manufacturing techniques available. Furthermore the chosen technologies lead to a restriction of the usable materials. Consequently the quantity of possible combinations of the geometries, materials and processing applicable is – due to this multitude of constraints – significantly reduced. While simultaneously defining the layout and the processing sequence the designer is inevitably confronted with the need for many iterative redesigns. Hence an automated tool, which encloses a compatibility evaluation of the defined sequence, is desirable. This paper introduces a software prototype for tackling this obstacle by employing an inference engine to verify user-defined process sequences.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology
Published: April 22, 2002
Pages: 364 - 367
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-6-3