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MEMS & NEMS Committee

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Committee Chairs

  • Narayan Aluru , University of Illinois at Urbana-Champaign

Annual Symposium Synopsys

Micro, and Nano Electro Mechanical systems (MEMS & NEMS), by their very nature as sensors and/or actuators, must interact with their environment. This need for interaction implies the interaction of various physical energy domains. Semiconductor materials naturally offer the strong field coupling required by such transducers, not only by their physical material properties, but also through the use of small length scales with corresponding manufacturing technologies.

Novel material sets, reduced physical dimensions, and the increasing blending of traditionally disparate engineering disciplines is evident in recent research and development in this rapidly developing field.

This symposium will address technical advancements in the topics listed below, but will encourage submissions addressing any research, development or commercialization activity. We additionally encourage your participation in this community, through your comments, suggestions and offers for assistance in review and organization.

Topics & Application Areas

  • Actuating Systems
  • Sensing Systems
  • Bio Sensors
  • Bio Micro Systems
  • RF Devices
  • Non-Silicon Materials
  • Circuits For Sensors & Actuators
  • Assembly & Packaging Technologies
  • Metrology and Characterization
  • System Architecture
  • Wireless Sensor Networks
  • Micro Fluidic Analysis Systems
  • Experimental Verification
  • Device Integration
  • Novel MEMS Devices
  • Novel NEMS Devices

Submit Proposal or Comment to Committee Chair

We encourage you to participate and to submit your interest as either an Scientific Committee Member or to organize a Scientific Committee*. The NSTI will provide the infrastructure for each Industrial Committee to organize and present a focused Symposium at the annual Nanotech Conference and Trade Show (Nanotech 2008, Boston, Massachusetts, June 1-5, 2008). Details will be provide upon approval of proposal.

* All submissions will be reviewed by the NSTI Scientific Committee Chairs and a timely response will be issued.

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