
	1998 NSTI Nanotechnology Conference & Trade Show	NSTI Home \| Subscribe \| Events \| News

Nanotech 98 Technical Program - Monday April 6

8:00	Registration

Conference Opening

Salons 4-5

8:15	Andreas Wild Motorola, Semiconductor Products Sector

Keynote Lectures

Salons 4-5

Session chair: Andreas Wild, Motorola

8:30	An Approach to Macro-Modeling of MEMS Devices Prof. Stephen D. Senturia Massachusetts Institute of Technology
9:15	Challenges in Process Modeling for MEMS Prof. Robert W. Dutton Stanford University

Break

10:00 - 10:20

Bulk and Topography Processing 1

Salon 5

Session chair: Franco Cerrina, University of Wisconsin-Madison

10:20	Molecular Dynamics (MD) Simulations of Reactive Ion Etching (RIE) of Si by Cl, Cl2, Br and Br2 Ions S.M. Valone, D.E. Hanson, J.D. Kress and A.F. Voter Los Alamos National Laboratory
10:45	Computer Aided Mask-Layout for Bulk Etch Fabrication M. Long and J.W. Burdick California Institute of Technology
11:10	A Semi-Empirical Resist Dissolution Model for Sub-micron Lithographies M. Khan and F. Cerrina UW-Madison
11:35	A Method of MOSFET Dopant Profile Prediction and its Use in Transistor Design M. Kulkarni, K. Fasanath, J. Davis, S. Saxena and G. Pollack Texas Instruments, Inc.

Characterization, Parameter Extraction, Calibration 1

Salon 4

Session chair: Narayan Aluru, University of Illinois at Urbana-Champaign

10:20	Microelectromechanical Systems (MEMS) Design and Design Automation Research at Duke University A. Dewey and R. Fair Duke University
10:45	Characterization of Electrostatically Actuated Beams Through Capacitance-Voltage Measurements and Simulations E.K. Chan, Z.K. Hsiau, K. Gaikipati and R.W. Dutton Stanford University
11:10	Numerical Mesh Effects on Model Calibration in Technology Simulation I. Kouznetsov, K. Vasanth, J. Davis, V. Axelrad, S. Saxena, R. Burch, S. Rao and P.K. Mozumder UC-Berkeley
11:35	1/f Noise Characterization of a Surface-Micromachined Suspended Gate FET H. Fu, M.L. Kniffin, G. Watanabe, M.P. Masquelier and J. Whitfield Motorola, Inc.

Lunch

12:00 - 13:20

Applications: Microfluidics 1

Salon 5

Session chairs: Philippe Renaud, EPFL, and Xavier Avula, University of Missouri-Rolla

13:20	A Surface Recombination Velocity Model for Liquid Flow in Microchannels J.N. Zemel University of Pennsylvania and Scitefair International Inc
13:45	Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror Pan, Kubby, Peeters, Tran and Mukherjee XEROX, *Cornell
14:10	Computational Fluid Dynamics Modeling of Micromachined Flexural Plat Wave Pumps A. Lal and R.M. White UC-Berkeley
14:35	Comprehensive Simulation of an Ion Mobility Spectrometer B.M. Cramer and D.A. Mlynski Universitat Karlsruhe

Modeling 1

Salon 4

Session chair: Henry Baltes, ETH Zurich

13:20	A Universal Low-Field Electron Mobility Model for Semiconductor Device Simulation G. Kaiblinger-Grujin, H. Kosina and S. Selberherr Vienna Technical University
13:45	Modeling of Threshold Voltage and Surface potential of NMOS Transistor with Localized Defects in Oxide A. Bouhdada, R. Marrakh and A. Touhami Universite Hassan II
14:10	A Physical I-V Model of Deep-Submicron FD SOI MOSFETs for Analogue/Digital Circuit Simulation H. Wang, X. Xi, X. Zhang and Y. Wang Peking University
14:35	PSDesigner: A Framework for Transistor Co-Optimization R. Burch, S. Saxena, P.K. Mozumder, K. Vasanth, J. Davis and S. Rao Texas Instruments, Inc.

Break

15:00 - 15:30

Applications: Pressure, Actuation, Navigation

Salon 5

Session chair: Chris Menzel, Ford Microelectronics Inc.

15:30	Hierarchical Representation and Simulation of Micromachined Inertial Sensors J.E. Vandemeer, M.S. Kranz and G.K. Fedder Carnegie Mellon University
15:55	Electromechanical Simulation of an Integrated Micromachined Accelerometer for the Prediction of System-Level Performance M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield Motorola, Inc.
16:20	Micromachined Accelerometer Design, Modeling and Simulation B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith Sandia National Laboratories
16:45	On the Vibrations of a MEMS Gyroscope W.O. Davis, O.M. O'Reilly and A.P. Pisano UC-Berkeley
17:10	Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm J.H. Correia, M. Bartek and R.F. Wolffenbuttel Delft University of Technology
17:35	Dynamic Effects of Linkage Joints in Electro-Static Micro-Engines J.J. Allen, S.L. Miller, G.F. LaVigne and M.S. Rodgers Sandia National Laboratories

Discretization, Numerics, Computational Efficiency 1

Salon 4

Session chair: Selden B. Crary, University of Michigan, Danish Technical University, Lyngby, Denmark

15:30	A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations N.R. Aluru and J. White MIT
15:55	The Adaptive Weighted Polynomial Preconditioner for the Semiconductor Equations T. Yang Linkoping University
16:20	Unstructured 3D Grid Toolbox for Modeling and Simulation M.P. Masquelier, D. George and A. Kuprat Motorola
16:45	Coupling of Length Scales and Atomistic Simulation of a MEMS Device R.E. Rudd and J.Q. Broughton SFA, Inc.
17:10	Automated 3D Topography Generation for MEMS Visualization D.L. DeVoe, S.B. Green and J.M Jump University of Maryland
17:35	Energy Based Resolution Method for the Global Comportment of Diaphragms Under Pneumatic and Electrostatic Pressure O. Francais and I. Dufour LISiR-URA-CNRS

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