NSTI Nanotech 2009

Curved Polymer Nanochannel Fabrication using PMMA Layer Transfer and Collapse

Y.H. Cho, H. Park, H.S. Kim, X. Cheng, A. Han
Texas A&M University, US

Keywords: curved nanochannel fabrication, layer transfer, nanoimprint

Abstract:

Many techniques are available for nanofluidic channel fabrication in materials such as silicon, quartz, SiN, and polymer for applications such as nanoscale fluid transport, DNA stretching, and manipulation and detection of single molecules for biosensing. Traditional nanochannel fabrica-tion using silicon and quartz requires expensive and time-consuming equipments such as electron beam lithography and focused ion beam milling. To overcome these limitations, varieties of polymer-based nanodevices that can be fabricated in large numbers with ease have been developed. Although promising, most of these methods are not suitable for fabricating curved nanochannels. Here, we present a simple and low-cost method to fabricate poly(methyl-methacrylate) (PMMA) nanochannels with various shapes by combining nanoimprint lithography (NIL) with a PMMA layer transfer and collapsing technique. We utilized PMMA membrane collapsing into microchannels to fabricate nanochannels at both corners of a microchannel. This allows nanochannels with various shapes such as curved nanochannels to be easily fabricated since the shape of the microchannel determines the shape of the nanochannels. This nanochannel fabrication method is simple, flexible, and low-cost since standard lithography with low-resolution optical masks can be used to fabricate nanoscale channels as small as 200 nm wide and having various shapes.
 
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