Nano-scaled water ejection using Nanopipette with QTF-AFM for Nanolithography
S.M. An, S.J. Jang, H.E. Noh, W.H. Jhe
Seoul National University, KR
Keywords: nanopipette, nanolithography, QTF-AFM
Abstract:We demonstrated that the apex of nanopipette with applying electric field could be used as a nano-scaled water ejection system using AFM(Atomic Force Microscopy) System based on QTF(Quartz Tunning Fork), namely nanolithography system. The tip diameter was 100~1000 nm which was fabricated by commercial pipette puller (P-2000) and electrode on the substrate was deposited by sputter deposition. With QTF-AFM feedback system, we could make the patterning on the substrate where we want. We could control the amount of water solution with applying electric field, tip diameter, distance between tip and substrate.