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Nanotechnology Conference and Trade Show - Nanotech 2006

Conference Proceedings

MEMS & NEMS

Symposium Chair

Narayan Aluru , University of Illinois at Urbana-Champaign

Symposium Chair

Narayan Aluru
University of Illinois at Urbana-Champaign

Kenotes: Sensors & Systems joint with MSM and MEMS & NEMS

	Nano Electromechanical Devices: Opportunities and Challenges Roger T. Howe Stanford University, US (speaker biography)
	A Designer’s Guide to CMOS MEMS Gary K. Fedder, Carnegie Mellon University, US (speaker biography)

	Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information Ken D. Wise, University of Michigan, Ann Arbor, USA, (speaker biography)
	Micropower Wireless Sensors Anantha P. Chandrakasan Massachusetts Institute of Technology, US, (speaker biography)

Confirmed Plenary Speakers

	Some Novel Applications for Wireless Inertial Sensors, Joe Paradiso Massachusetts Institute of Technology, US, (speaker biography)
	Inertial Sensors — Smart Sensor Design Challenges Andrei M. Shkel University of California, Irvine, US, (speaker biography)

	Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications, Mehran Mehregany, Case Western Reserve University, US, (speaker biography)
	Micro Power Generation — MEMS and NEMS Systems Skandar Basrour TIMA Laboratory, FR

Symposium Sessions
	Monday May 8
6:00	Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903
	Micro & Nano Fluidics - 1
	Tuesday May 9
8:30	Keynote - Sensors & Systems: MEMS & NEMS, MSM
10:30	Sensors & Systems: MEMS Sensors
10:30	Sensors & Systems: Optical MEMS Systems
10:30	Fluidics: Two-Phase Micro Fluidics: Sponsored by Kodak
1:30	Sensors & Systems: Smart Systems
1:30	MSM: MEMS Device Modeling
1:30	Fluidics: Micro & Nano Flow Modeling & Fundamentals: Sponsored by Kodak
4:00	Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716
	MEMS Device Modeling
	Micro & Nano Fluidics - 2
6:00	Fluidics: Integrated Micro Fluidic Systems: Sponsored by Kodak
	Wednesday May 10
8:30	Keynote - Sensors & Systems: Microsystems: MSM
8:30	Keynote - Nanotech Materials and Chemistry: NanoFab: Nano Electronics
10:30	Sensors & Systems: Wireless Sensor Networks
10:30	Sensors & Systems: Chemical & Gas Sensing
10:30	Bio Sensors and Diagnostics: Sensors & Systems
1:30	Sensors & Systems: Wireless Sensor Networks
1:30	MSM: Novel MEMS Devices & Processes
4:00	Sensors & Systems: Novel MEMS, NEMS & Sensing
4:00	Bio Sensors and Diagnostics: Fluidics: Lab-On-Chip
6:00	Poster Session 3 and Reception
	MEMS and NEMS
	Bio Micro Systems
	Sensor Systems
	Thursday May 11
8:30	Keynotes - NanoFab: Nano Electronics

Symposium Program
	Monday May 8
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6:00	Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903	Expo Hall
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	Micro & Nano Fluidics - 1	Expo Hall
-	AC Electroosmotic Fluid Flow in Electrolytes Generated by Two Coplanar Microelectrodes K. Adamiak, University of Western Ontario, CA
-	Microchannel Mixing, Entropy and Multifractals M. Kaufman, M. Camesasca, I. Manas-Zloczower, Cleveland State University, US
-	Computationally Efficient Models of Flow-through Affinity-based Assays D.K. Peterson, W.H. Wright and D.B. MacQueen, SRI International, US
-	Simulation and Optimization of a Flow-Through Micro PCR Chip J. Kang, C.-C. Chen, J. Smolinski, R.A. Thomas, J.D. Tucker, G.W. Auner, Industrial Technology Research Institute, TW & Wayne State University, US
-	Simulation of a Microfluidic Particle Concentrator and Separator C.-C. Chen and G.W. Auner, Industrial Technology Research Institute, TW & Wayne State University, US
-	Computational experiments on three-dimensional molecular diffusion in porous media V.J. Alarcon, W. Kingery and J. Zhu, Mississippi State University, US
-	Full Coupling Simulation of a Membrane Micropump Q. Yao, D. Xu, L.S. Pan, A.L. Melissa Teo, W.M. Ho, V.S. Peter Lee and M. Shabbir, Institute of High Performance Computing, SG
-	Heat Transfer Cost-Effectiveness of Nanofluids D. Xu, L. Pan and Q. Yao, Institute og High Performance Computing, SG
-	High-Throughput Screening Devices Based on Hydrophobic Microfluidics J.J. Chen, H.J. Yang, J.W. Wu, S.H. Parng and T.M. Yu, Industrial Technology Research Institute, TW
-	Shape Oscillation and Internal Mixing in Sessile Liquid Drops using ElectroWetting-On-Dielectric (EWOD) R. Miraghaie, J.D. Sterling and A. Nadim, Keck Graduate Institute, US
-	Directed Evolution in Microreactors A. Hübner, H. Leemhuis and F. Hollfelder, University of Cambridge, GB
-	Microfluidic Control for Gravity-Driven ELISA Apparatus J.W. Wu and N.K. Yao, ITRI/ERSO, TW
-	Microfluidic Device for Conventional and Traveling-Wave Dielectrophoresis A. Kumar, A. Acrivos, B. Khusid and C.D. James, New Jersey Institute of Technology, US
-	Experimental Visualization of Bubble Generation and Breakup in T-junctions of Microchannels Y. Zhang, Q. Xiao, L. Cheng and L. Wang, The University of Hong Kong, HK
-	Computational Heat Transfer and Two-phase Flow in Miniature Tubes D. Lakehal and C. Narayanan, ASCOMP, CH
-	DNA Extraction with Parallel Electrodes on Microfluidic System S.H. Parng, T.K. Shia, H.J. Yang and C.H. Kuo, Microsystem Technology Common Laboratory, TW
-	Micro-Fluidics at ATMC L. Bullock, University of Massachusetts Dartmouth, US
-	Quantitative Spatial Mapping of Mixing and Temperature in Microfluidic Systems E.M. Graham, S.W. Magennis, K.G. Macnamara, D.P. Towers and A.C. Jones, University of Edinburgh, UK
-	A Novel Technique for Fabricating Biomolecular Nano-Arrays K. Barbee and X. Huang, University Of California, San Diego, US
-	Preparation and Characterization of Various Nanofluids W.C. Williams, I.C. Bang, E. Forrest, L.W. Hu and J. Buongiorno, Massachusetts Institute of Technology, US
	Tuesday May 9
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8:30	Keynote - Sensors & Systems: MEMS & NEMS, MSM	Room 112
	Session chair: Elena Gaura, Coventry University, UK
8:30	Nano Electromechanical Devices: Opportunities and Challenges (invited) R.T. Howe, Stanford University, US (speaker biography)
9:15	A Designer’s Guide to CMOS MEMS (invited) G.K. Fedder, S. Simone and N. Sarkar, Carnegie Mellon University, US (speaker biography)
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10:30	Sensors & Systems: MEMS Sensors	Room 112
	Session chair: Mehran Mehregany, Case Western Reserve University, USA
10:30	A Novel Optical Waveguide Based Accelerometer F. Chen, Z. Salcic and J. Wang, The University of Auckland, NZ
10:50	Optical Micro-Spectrometer with Sub-Nanometer Resolution I. Avrutsky, K. Chaganti, I. Salakhutdinov and G. Auner, Wayne State University, US
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10:30	Sensors & Systems: Optical MEMS Systems	Room 105
	Session chair: Skandar Basrour, TIMA, Micro and Nano Systems Group, France
10:30	Silicon MEMS for Photonic Bandgap Devices (invited) E.M. Yeatman and A. Lipson, Imperial College London, UK (speaker biography)
11:00	Improvement of dynamic features of an adaptive optical system for detection and correction of ophthalmic distortions (invited) D.W. de Lima Monteiro, A.S.O. Furtado, O. Soloviev, A.I. Ferreira Jr, F.B. Teixeira, J.G.M. Melo and G. Vdovin, Universidade Federal de Minas Gerais, BR (speaker biography)
11:20	A Multi-Purpose Optical MEMS Sensor for Harsh Environments P. Nieva, N. McGruer, G. Adams, University of Waterloo, CA
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10:30	Fluidics: Two-Phase Micro Fluidics: Sponsored by Kodak	Room 104
	Session chair: Ed Furlani, Kodak, US
10:30	Simulation of filling of microfluidic devices using a coarse-grained continuum contact angle model C. Narayanan and D. Lakehal, ASCOMP, CH
10:50	On the Motion of a Bubble through Microchannel Contractions H. Chio, M-J Jensen, X. Wang, H. Bruus and D. Attinger, Columbia University, US
11:10	Superhydrophobic Nanowire Surfaces for Drop Movement Using Magnetic Fields A. Egatz-Gomez, S. Melle, A.A. García, S. Lindsay, M.A. Rubio, P. Domínguez, T. Picraux, J. Taraci, T. Clement, M. Hayes and D. Gust, Arizona State University, US
11:30	Electrophoretic Transport of Proteins in Microchannels Filled with Immiscible Aqueous Phases G. Muenchow, S. Hardt, K.S. Drese, J.P. Kutter, Darmstadt University of Technology, DE
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1:30	Sensors & Systems: Smart Systems	Room 112
	Session chair: Gary K Fedder, Carnegie Mellon University, USA
1:30	Evolution of Chip-Scale Gyroscopes: From Solid-State to Atomic (invited) A.M. Shkel, University of California Irvine, US (speaker biography)
2:00	Validation for Micro- and Nano-Sensors (invited) M. Henry, Oxford University, UK (speaker biography)
2:30	“Smart” Holograms – A Novel Diagnostics Platform (invited) S. Kabilan, A.J. Marshall, A. Horgan, C.D. Creasey, S.J. Kew, K.E.S. Dean, S.F. Terrell, L.J. Affleck, Smart holograms, UK (speaker biography)
3:00	Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications (invited) M. Mehregany, X-A Fu and L. Chen, Case Western Reserve Univesity, US (speaker biography)
3:30	Nanotechnology Enabled Research at the North Dakota's Center for Nanoscale Science and Engineering: Novel Approaches to Sensing (invited) D.B. Chrisey, North Dakota State University, US (speaker biography)
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1:30	MSM: MEMS Device Modeling	Room 106
	Session chair: Bob Newman, Coventry University, UK
1:30	Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures J. Liu, G.K. Fedder, S. Sassolini and N. Sarkar, Carnegie Mellon University, US
1:50	MEMS Process Characterization with an on-Chip Device D. Garmire, H. Choo, R.S. Muller, S. Govindjee and J. Demmel, UC Berkeley, US
2:10	Analytic Damping Model for a Square Perforation Cell T. Veijola, Helsinki University of Technology, FI
2:30	Simulations of the Anchor Losses in MEM Disk Resonators D. Paci, S. Stoffels and H.A.C. Tilmans, IMEC, BE
2:50	Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes R. Khalilyulin, T. Hauck and G. Wachutka, Munich University of Technology, DE
3:10	Microcantilever Sensor via Second Order Sliding Mode Control J. English, Y. Shtessel, M. Yegnaraman and M. George, University of Alabama in Huntsville, US
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1:30	Fluidics: Micro & Nano Flow Modeling & Fundamentals: Sponsored by Kodak	Room 104
	Session chair: James Gleeson, University College Cork, UK
1:30	Simulation of Electrokinetic Flow and Analyte Transport in Nano Channels J.J. Feng, S. Krishnamoorthy, G.W. Wang and S. Sundaram, CFD Research Corporation, US
1:50	Infinitely fast reactions in micromixers J.P. Gleeson, University College Cork, Ireland, IE
2:10	Electric Field Driven Motion of Flexible Polyelectrolytes – A Molecular Dynamics Study T.S. Lo, B. Khusid, A. Acrivos and J. Koplik, New Jersey Institute of Technology, US
2:30	Macromodeling for Microfluidic Channels C-W Kuo, C-M Chein and Y-J Yang, National Taiwan University, TW
2:50	Capillary filling speed in silicon dioxide nano-channels S.E. Jarlgaard, M.B.L. Mikkelsen, P. Skafte-Pedersen, H. Bruus and A. Kristensen, Technical University of Denmark, DK
3:10	Magnetohydrodynamic (MHD) Complex Flow Generation in Microchannel D.S. Kim and T.H. Kwon, Pohang University of Science and Technology (POSTECH), KR
3:30	Analysis of the Droplet Ejection for Piezoelectric-driven Industrial Inkjet Head S. Sim, S-J Park, C. Park, Y. Yoo, Y. Kim, J. Joung and Y. Oh, Samsung Electro Mechanics Co., KR
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4:00	Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716	Expo Hall
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	MEMS Device Modeling	Expo Hall
-	Parameterizable Library Components for SAW Devices W.C. Wilson and G.M. Atkinson, NASA Langley Research Center, US
-	Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix M. Husak, A. Boura and J. Jakovenko, Czech Technical University in Prague, CZ
-	Two-To-One Internal Resonance in Microscanners M.F. Daqaq, E.M. Abdel-Rahman and A.H. Nayfeh, Virginia Polytechnic Institute and State University, US
-	Manipulation of Capillary force by Electrowetting for Micromanipulation S. Chandra and C. Batur, University of Akron, US
-	Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch W. Wang, R. Popuri, S. Onishi, J. Bumgarner and L. Langebrake, University of South Florida, US
-	Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration B. Bercu, L. Montès and P. Morfouli, INPG-MINATEC, FR
-	Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements J. You, M. Packirisamy and I. Stiharu, Concordia University, CA
-	Application of a Design Methodology Using a 2D Micro Scanner O. Anac and I. Basdogan, Koc University, TR
-	Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors A. Sabet and X.J. Avula, Washington University in St. Louis, US
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	Micro & Nano Fluidics - 2	Expo Hall
-	Microfluidic System for Assessing the Controllability of MC-1 Magnetotactic Bacteria as Carriers in Micro-channels Z. Lu and S. Martel, NanoRobotics Laboratory, CA
-	Microfluidics and Rheology of Carbon Black Dilute Suspensions: Modeling, Measurement, and Applications C. Aramphongphun, O. Hemminger, J.M. Castro and L.J. Lee, The Ohio State University, US
-	Synthesis of Shear Thickening Fluid Using Sonochemical Method V.K. Rangari, T.A. Hassan, H. Mahfuz and S. Jeelani, Tuskegee University, US
-	A Micromachined Sparse Cell Isolation Device: Application in Prenatal Diagnostics H. Mohamed, J.N. Turner and M. Caggana, Wadsworth Center, New York State Department of Health, US
-	Chemically Robust Microfluidic Devices for Radiochemistry Platforms J.P. Rolland, A. Elizarov, J. Brewster, J.R. Heath and J.M. DeSimone, Liquidia Technologies, US
-	Chaotic flows in microchannels: A lattice Boltzmann study F. Varnik and D. Raabe, Max-Planck Institut fuer Eisenforschung, DE
-	Microfluidic T-Form Mixer Utilizing Pressure Disturbances Y.B. Ma, M. Fields, C.P. Sun, F.Y. Zhang, J.C. Liao, Y. Li, B.M. Churchill and C.M. Ho, University of California at Los Angeles, US
-	Thermal modeling of a PMMA microfluidic separation chip Y. Zhu and A. Bui, CSIRO Australia, AU
-	Cell and Particle Concentration on the Chip D. Irimia and M. Toner, Massachusetts General Hospital, Harvard Medical School, US
-	Modeling multi-scale liquid dispersion phenomena in conjunction with Computational Fluid Dynamics S. Mohan, A. Haidari and A. Mukopadhyay, Fluent, Inc., US
-	Optical and impedance detection of DNA hybridisation on barcoded micro particles in a microfluidic device D. Holmes, A. Whitton, G. Cavalli-Petraglia, G. Galitonov, S. Birtwell, S. Banu, N. Zheludev and H. Morgan, University of Southampton, UK
-	Numerical Simulation of Microchannel Convection L. Wang and F. Liu, The University of Hong Kong, HK
-	Characterisation of thin film piezoelectric materials by differential interferometric techniques M.G. Cain, M. Steward and M. Downs, National Physical Laboratory, UK
-	Nano level study of superhydrophobic material with an acoustic multiresonance shear wave sensors S.J. Kwoun, R.M. Lec, R.A. Cairncross, P. Shah and C.J. Brinker, Drexel University, US
-	A Behavior of Protein Adsorption on Poly(Ethylene Glycol)-Modified Surfaces under Flow Conditions at Relatively Low Concentrations for Microfluidics Systems C.J. Chun, K. Lenghaus, L. Riedel, A. Bhalkikar and J.J. Hickman, University of Central Florida, US
-	Integrated Microfluidic Device with an Electroplated Palladium Decoupler for Electrochemical Detection of the 8-hydroxydeoxyguanosine (8-OH-dG) DNA Adduct A.A. Dawoud, T. Kawaguchi and R. Jankowiak, Iowa State University, US
-	Analytical Model for Magnetic Particle Transport in a Magnetically Biased Microfluidic System E.P. Furlani, University at Buffalo, US
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6:00	Fluidics: Integrated Micro Fluidic Systems: Sponsored by Kodak	Room 209
	Session chair: Boris Khusid, New Jersey Institute of Technology, US
6:00	Thermally Induced Marangoni Instability of Liquid Microjets with Application to Continuous Inkjet Printing E.P. Furlani, B.G. Price, G. Hawkins and A.G. Lopez, Eastman Kodak Co., US
6:20	Integrated microfluidic device to monitor the cells acidification rate in nanoliter volumes using microfabricated iridium oxide electrodes I.A. Ges, B.L. Ivanov and F.J. Baudenbacher, Vanderbilt University, US
6:40	Coin-Shaped Reactor in Microfluidic Devices Used for Radiopharmaceutical Synthesis A.M. Elizarov, H.C. Kolb, R.M. van Dam, J.R. Heath, H.C. Padgett, J. Huang, A. Daridon, California Institute of Technology, US
7:00	Mixed-Methodology-Based System-Level Simulation of Biochemical Assays in Integrated Microfluidic Systems Y. Wang, A.S. Bedekar, S. Krishnamoorthy, S.S. Siddhaye and S. Sundaram, CFD Research Corporation, US
	Wednesday May 10
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8:30	Keynote - Sensors & Systems: Microsystems: MSM	Room 112
	Session chair: Elena Gaura, Coventry University, UK
8:30	Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information (invited) K.D. Wise, University of Michigan, US (speaker biography)
9:15	Micropower Wireless Sensors (invited) A.P. Chandrakasan, N. Verma, J. Kwong, D. Daly, N. Ickes, D. Finchelstein, B. Calhoun, Massachusetts Institute of Technology, US (speaker biography)
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8:30	Keynote - Nanotech Materials and Chemistry: NanoFab: Nano Electronics	Room 210
	Session chair: Leo Ocola, Argonne National Lab, US
8:30	Integrating soft and hard materials in nanoscale based devices (invited) N. Petersen, NRC-CNRC, CA (speaker biography)
9:15	Nanotechnology and Energy, the Smalley Vision: Be a Scientist-- Save the World (invited) W. Adams, Amy Jaffe and Richard Smalley(deceased), Smalley Institute, Rice University, US (speaker biography)
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10:30	Sensors & Systems: Wireless Sensor Networks	Room 112
	Session chair: Ken D Wise, University of Michigan, USA
10:30	Experimental Localization with MICA2 Motes M.P. Allen, E.I. Gaura, R.M. Newman and S.N.I. Mount, Coventry University, UK
10:50	Size does matter – the case for big motes (invited) R.M. Newman and E.I. Gaura, Coventry University, UK (speaker biography)
11:10	Wireless Micro and Nano Sensors for Physiological and Environmental Monitoring B. Kaminska, Simon Fraser University, CA
11:30	Bridge Local Scour Monitoring System Using MEMS Sensor Zigbee Network Y-B Lin, C-C Lee, J-C Chen, K-C Chang and J-S Lai, National Center for Research on Earthquake Engineering, TW
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10:30	Sensors & Systems: Chemical & Gas Sensing	Room 104
	Session chair: Davies de Lima Monteiro, OptMA lab, Universidade Federal de Minas Gerais, Brazil
10:30	Micro/Nanofabricated Biochemical Sensors (invited) A. Seshia, University of Cambridge, UK
11:00	Sensing of Organic Vapors by Flame-Made TiO2 Nanoparticles A. Teleki, S.E. Pratsinis, K. Kalyanasundaram and P.I. Gouma, ETH Zurich, CH
11:20	Novel Sensing Array Nanomaterials: Molecularly-Mediated Assemblies of Nanoparticles C-J Zhong, S. Lu, L. Wang, X. Shi, M. Schadt, W. Hao and J. Luo, State University of New York at Binghamton, US
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10:30	Bio Sensors and Diagnostics: Sensors & Systems	Room 208
	Session chair: Mehran Mehregany, Case Western Reserve University, USA
10:30	Overview - Bio Sensors and Diagnostics (invited overview presentation) S. Iyer, Los Alamos National Laboratory, US
11:00	Detection of Biological Species by Surface Enhanced Raman Scattering A. Sengupta, M. Volny, C.B. Wilson, F. Turecek and E.J. Davis, University of Washington, US
11:20	Multi-plex biomolecular detection using Bio-nanotransduction J.R. Branen, University of Idaho, US
11:40	Integrated Techniques for Transmembrane Protein Sensing S.J. Wilk, L. Petrossian, M. Goryll, T.J. Thornton, S.M. Goodnick, J.M. Tang and R.S. Eisenberg, Arizona State University, US
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1:30	Sensors & Systems: Wireless Sensor Networks	Room 112
	Session chair: Bob Newman, Coventry University, UK
1:30	Some Novel Applications for Wireless Inertial Sensors (invited) J.A. Paradiso, Massachusetts Institute of Technology, US (speaker biography)
2:00	Augmented materials – micro and nano sensing (invited) K. Delaney, University College Cork, IE (speaker biography)
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1:30	MSM: Novel MEMS Devices & Processes	Room 104
	Session chair: Skandar Basrour, TIMA, Micro and Nano Systems Group, France
1:30	Electromechanical System for Lorentz Force Compensation P. Sekalski, A. Napieralski and S. Simrock, Technical University of Lodz, PL
1:50	Negative-Poisson’s-Ratio (NPR) Microstructural Material by Soft-Joint Mechanism Y-W Lu, C-J Chang, P-T Lin and H-C Gea, Rutgers University, US
2:10	Optimization of Diffractive MEMS for Optical Switching J. Verheggen, G. Panaman, W. Khan Raja and J. Castracane, University at Albany, SUNY, US
2:30	Active Sealing for Soft Poymer Microchips H. Bang, W.G. Lee, J. Park, H. Yun, J. Lee, S. Chung, K. Cho, C. Chung, D-C Han and J.K. Chang, Seoul National University, KR
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4:00	Sensors & Systems: Novel MEMS, NEMS & Sensing	Room 112
	Session chair: Ashwin Seshia, Cambridge University, UK
4:00	Power Generation based on Micro-Electro Mechanical Devices (invited) S. Basrour, TIMA Laboratory, FR (speaker biography)
4:30	A Bio-Inspired Rotor Powered by a Micro-Bubble J. Kao, J. Warren, J. Xu and D. Attinger, Columbia University, US
4:50	MEMS-based solid propellant micro-rocket with micro-igniter on thin membrane for next generation of low-cost small space and aeronautic engines A. Chaalane, C. Rossi and D. Estève, LAAS-CNRS, FR
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4:00	Bio Sensors and Diagnostics: Fluidics: Lab-On-Chip	Room 208
	Session chair: Martin Gijs, EPFL, CH
4:00	Microfluidics and Miniaturized Arrayed Assays for the Evaluation of Biological Diversity (invited) G. Dernick, Hoffmann-La Roche AG, CH (speaker biography)
4:30	Compact Disc (CD)-Based Automated Animal Assay N.H. Kim, C.M. Dempsey, J. Zoval, J.Y. Sze and M.J. Madou, University of California, Irvine, US
4:50	DNA repair enzyme analysis on EWOD fluidic microprocessor D. Jary, A. Chollat-Namy, Y. Fouillet, J. Boutet, C. Chabrol, G. Castellan, D. Gasparutto and C. Peponnet, CEA, FR
5:10	Detection and Localization of Antibody-Antigen Interactions with High Spatial Resolution on Collagen Tendons R.D. Boyd, R. Avci, M. Schweitzer, J. Wittmeyer, B. Spangler and K.M. Thieltges, Cranfield University, UK
5:30	Fast and Efficient Nucleic Acid Testing by ST‘s In-CheckTM Lab-on-Chip Platform S. Conoci, P. Di Pietro, S. Petralia, M.G. Amore, F. San Biagio, G. Alaimo, G. Iacono, E. Alessi, D. Ricceri, G. Di Trapani, F. Di Francesco and M. Palmieri, STMicroelectronics, IT
5:50	Optimizing antibody microarrays for high resolution SPR microscopy G. Kim, A. Nishimoto, S. Cong, E. Johnson, H.W. Guan, B. Petcavish, S. Lasky, L. Hood and C.T. Campbell, Lumera Corporation, US
6:10	A Continuous Particle/Cell Sorter Using Dielectrophoresis G.R. Wang, J.J. Feng, S. Vasantgadkar, K. Pant, B. Prabhakarpandian, S. Krishnamoorthy and S. Sundaram, CFD Research Corporation, US
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6:00	Poster Session 3 and Reception	Hall D
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	MEMS and NEMS	Hall D
-	Building an Effective Patent Portfolio B.S. Itchkawitz, KNOBBE, MARTENS, OLSON & BEAR LLP, US
-	Fabrication and Characterization of Ultra Thin Resonant Nanocantilevers in Aluminium-Molybdenum Composites N. Nelson-Fitzpatrick, L.M. Fischer, S. Evoy, C. Ophus, Y. Wang, D. Mitlin, Z-H. Lee, V. Radmilovic and U. Dahmen, University of Alberta, CA
-	Tuning of a MEMS RF Filter B.K. Hammad, E.M. Abdel-Rahman and A.H. Nayfeh, Virginia Polytechnic Institute and State University, US
-	Low Cost Vibration Measuring Device Using MEMS Accelerometer J. Pandiyan, M. Umapathy, S. Balachandar, M. Arumugam and S. Ramaswamy, Larsen & Toubro Limited, IN
-	The Bonding Technology for Microchannels with Electrode Patterns on the Glass Substrates S.H. Parng, H.J. Yang and T.K. Shia, Microsystem Technology Common Laboratory, TW
-	Biocompatible Hybrid System Integration of Silicon Based Neural Interface Device P. Tathireddy, S. Chakravarthy, J. Hsu, M. Klein, H. Oppermann, L. Rieth, R. Harrison, R.A. Normann, F. Solzbacher, University of Utah and Fraunhofer Institute, Germany, US
-	MEMS Reliability Assessment Program – Progress to Date J.L. Zunino III and D.R. Skelton, U.S. Army ARDEC, US
-	Three-dimensional Simulation method of Anisotropic Wet Chemical Etching Process J-G Lee and T. Won, Inha University, KR
-	Frequency Tuning of Micro-beams using Electrostatic Pull-in J.S. Burdess, A.J. Harris and S. Kafumbe, University of Newcastle, UK
-	Investigating the Benefit-Cost of MEMS Application for Structural Health Monitoring of Transportation Infrastructure M.K. Jha and A.B. Davy, Morgan State University, US
-	Nonlinear Oscillators as Nanomechanical Memory R. Badzey, A. Gaidarzhy, G. Zolfagharkhani and P. Mohanty, Boston University, US
-	RF Oscillators Obtained From Coupled Nanomechanical Devices A. Gaidarzhy, G. Zolfagharkhani, R. Badzey and P. Mohanty, Boston University, US
-	Dielectrophoretic ratchets for linear and rotary nanomotors M.P. Hughes and R.D. Astumian, University of Surrey, UK
-	A Capillary Electrophoresis Chip for Rhodamine B and Inorganic Ion detection Utilizing Contactless Capacitance Detection W.L. Liu, W.J. Chen, S.H. Hsieh and T.K. Tsai, National Pingtung University of Science and Technology, TW
-	Ultra High performance In-line Contact MEMS RF Switch Y-T Hong, C-H Kim, S-H Lee, S-W Kwon and I-S Song, Samsung Advanced Institute of Technology, KR
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	Bio Micro Systems	Hall D
-	Design of a Wireless Passive Microsensor for Injection into the Human Brain J.P.F. Spratley, P.S. Hall and M.C.L. Ward, University of Birmingham, UK
-	Preservation of DNA and Protein Biofunctionality for Bio-MEMS & NEMS Fabrication D. Trau, J. Jie and N.J. Sucher, National University of Singapore (NUS), SG
-	Reflex-arc on a chip: An in silico cell culture analogue K.A. Wilson, M. Das, P. Molnar and J.J. Hickman, University of Central Florida, US
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	Sensor Systems	Hall D
-	Odor sensor using quartz crystal microbalance coated with molecular recognition membrane H. Nanto, Y. Takei, T. Imamura and D. Ishigure, Kanazawa Institute of Technology, JP
-	Fabrication technique for nanochannel with directed buckle patterning S. Chung, M-W Moon, K.H. Oh, D.C. Han, R.D. Kamm and J.W. Hutchinson, Massachusetts Institute of Technology, US
-	An Analytical Model for Multi-layer and Multi-electrode Piezoelectric Ceramic Actuators B-L. Wang and Y-W. Mai, The University of Sydney, AU
-	A Novel FSMA Actuation Mechanism for MIcrovalve Applications A. Agarwal, M. Kohl and W. Basuki, Indian Institute of Technology, IN
-	MEMS Micro Spectrometer E.R. Schildkraut, D.J. Cavicchio and D. Reyes, Block MEMS, LLC, US
-	Electrospun TiO2 nanofibers for gas sensing applications I-D Kim, A. Rothschild, H.L. Tuller, D.Y. Kim and S.M. Jo, Korea Institute of Science and Technology, KR
-	A Nanoporous Silicon 1-D Photonic Band Gap Microcavity as a Selective Optical Sensor S. Chappel, L. DeLouise and B. Gersten, Queens College, US
-	Sensitivity of Initially Stressed Un-symmetric Micro-Layered Plate in Large Deflection due to Lateral Load C-F. Chen, Chung-Hua University, TW
-	The Dynamic Performance of a Micro-machined Coriolis Flow Meter C. Clark, S. Wang and R. Cheesewright, Brunel University, UK
-	Trade-Offs in Cooperative Goal Seek using Nano-Devices S. Chnadrasekaran and D.F. Hougen, Oklahoma University, US
	Thursday May 11
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8:30	Keynotes - NanoFab: Nano Electronics	Room 112
	Session chair: Leo Ocola, Argonne National Laboratory, US
8:30	Nanomanufacturing Challenges (invited) D. Eaglesham, Applied Materials, US (speaker biography)
9:15	Nanotechnology from the bottom up: Light-directed Synthesis of DNA molecules (invited) F. Cerrina, University of Wisconsin-Madison, US (speaker biography)

Special Symposium

Micro, and Nano Electro Mechanical systems (MEMS & NEMS), by their very nature as sensors and/or actuators, must interact with their environment. This need for interaction implies the interaction of various physical energy domains. Semiconductor materials naturally offer the strong field coupling required by such transducers, not only by their physical material properties, but also through the use of small length scales with corresponding manufacturing technologies.

Novel material sets, reduced physical dimensions, and the increasing blending of traditionally disparate engineering disciplines is evident in recent research and development in this rapidly developing field.

This symposium will address technical advancements in the topics listed below, but will encourage submissions addressing any research, development or commercialization activity. We additionally encourage your participation in this community, through your comments, suggestions and offers for assistance in review and organization.

Journal Submissions

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the "Submit to Journal of Experimental Nanoscience" button during the on-line submission procedure. Please note that you may only select a single journal during the submission process.

Molecular Simulation

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of Molecular Simulation.

For consideration into this Special Issue of Molecular Simulations, please select the "Submit to Molecular Simulation" button during the on-line submission procedure. Please note that you may only select a single journal during the submission process.

Topics & Application Areas

Actuating Systems
Sensing Systems
Bio Sensors
Bio Micro Systems
RF Devices
Non-Silicon Materials
Circuits for Sensors & Actuators
Assembly & Packaging Technologies
Metrology and Characterization
System Architecture
Wireless Sensor Networks
Micro Fluidic Analysis Systems
Experimental Verification
Device Integration
Novel MEMS Devices
Novel NEMS Devices
Other

Conference Quick Links

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Conference Proceedings

MEMS & NEMS

Symposium Chair

Symposium Chair

Kenotes: Sensors & Systems joint with MSM and MEMS & NEMS

Confirmed Plenary Speakers

Symposium Sessions

Monday May 8

Tuesday May 9

Wednesday May 10

Thursday May 11

Symposium Program

Monday May 8

Tuesday May 9

Wednesday May 10

Thursday May 11

Special Symposium

Journal Submissions

Journal of Experimental Nanoscience

Molecular Simulation

Topics & Application Areas

Conference Quick Links